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Resistivity Standards
 

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Model Number Wafer Type Nominal Bulk Resistivity Nominal Sheet Resistivity
SRS-0.002 3 inch p-type Silicon<100> 0.002 Ω-cm 0.04 Ω
SRS-0.01 3 inch p-type Silicon<100> 0.01 Ω-cm 0.2 Ω
SRS-0.03 3 inch p-type Silicon<100> 0.03 Ω-cm 0.6 Ω
SRS-0.3 3 inch p-type Silicon<111> 0.03 Ω-cm 6 Ω
SRS-0.9 3 inch p-type Silicon<111> 0.9 Ω-cm 18 Ω
SRS-25 3 inch p-type Silicon<111> 25 Ω-cm 500 Ω
SRS-30 3 inch p-type Silicon<111> 30 Ω-cm 600 Ω
SRS-57 3 inch p-type Silicon<111> 57 Ω-cm 1100 Ω
SRS-75 3 inch p-type Silicon<111> 75 Ω-cm 1500 Ω
 
 

Note: The Certification is based on the Model # SRS-0.002 and includes typical results.
 
 
 
 
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