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Lucas Signatone QuadMap Resistivity Test System
 

The QuadMap features tools necessary for engineers to define meaningful test parameters and operators to quickly load a sample and test.

 

Operators simply place the sample on the vacuum chuck, close the door, enter the ID of the test sample and press the Start button. The sample loads, and begins testing. A typical 50 location test, on a 300mm wafer will complete in less than one minute. During the test, the results table displays each test site’s results and highlights in red for failures.

At the conclusion of the test, the data is automatically stored in a database. Operators may view the wafer graphs in up to 5 different formats including 2D black & white, 2D color, 3D, 3D half X and 3D half Y. Statistical results shown include Avg, Std Dev, 1Sigma, Max and Min. Operators may also print a report (printer not included) or export data to a spread sheet and save to a USB flash drive.


Engineers define and create tests to verify the processing tolerances are in compliance. They define the test modes including autorange or current setting, dual configuration, sensitivity and pass/fail tolerances. Additionally, engineers will also define the number of test sites up to 14,000, which probe head is installed, sample size, edge exclusion, etc. Once a test is defined, it is stored in the test list. Of course, Engineers have all of the same privileges as operators and can run the tests desired.

Engineers will also appreciate the powerful trending tool provided by QuadMap. With the data automatically stored into a data base; after a number of tested samples, engineers can sort the results and identify trends effecting the measured samples.

QuadMap is defined for the production environment. Bright polished stainless steel skins and other materials assure Fab ready operation. A modular design assures that if a failure does occur, a field service technician can quickly replace the errant part.

 

  • High speed measurements of thin films, wafers and solar tiles.
  • Reports sheet resistance Ohms per square and resistivity in Ohms per cm.
  • Available in 150mm, 156mm square, 200mm and 300mm configurations
  • Speed: 50 points per minute with standard configuration
  • Dual configuration: applies the standard ## to automatically correct for geometric errors caused by probe spacing and/or edge proximity , improving overall accuracy
  • Auto-range: finds the ideal current setting to meet the parameters of the standard for measuring.
  • Standard range: 1mΩ to 100MΩ per square
  • P/N typing
  • 5 different 2D and 3D mapping to choose from
  • Data is automatically stored and may be exported to a spread sheet.
  • Optional SECSII/GEM interface allows control and ability to upload data from FAB management system

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Key features in all Signatone systems include auto-range and dual configuration. Auto-range automatically finds the ideal current setting to meet the parameters of the standard for measuring. At the first test site, the software controls the current source to step through a number of settings until the measured voltage is in target range as defined by the standard. This current is then used for all subsequent measurements of the sample. Dual configuration mode applies the standard ## to automatically correct for geometric errors caused by probe spacing and/or edge proximity improving overall accuracy.

Signatone offers 3 product families- The QuadMap for production, the QuadPro for R&D and the Pro4 for basic, manual measurements. Each family has a variety of options and configurations. With over 60 configurations to choose from, Signatone has the product that will meet your application.


QuadMap Resistivity Test System QuadMap Wafer Setup Screen
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QuadMap Statistics Screen
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